With the increasing integration of LSI chips used in advanced products such as large flat panel displays, it is essential to regularly monitor gaseous and particle contaminants in clean rooms.

The CM501 measures ammonia, acid gases, in sample gas. They do this continuously with high sensitivity (ppt level) and good repeatability by using a diffusion scrubber and an ion chromatograph. The diffusion scrubber absorbs the sample gas in pure water, and the sample is then analyzed by the ion chromatograph.