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YOKOGAWA

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Yokogawa Electric Corporation

Clean Room Gas Monitors (Discontinued)

The CM501 and CM505 Clean Room Gas Monitors measure ammonia, acid gases, cations, organic acids, and boron in sample gas. They do this continuously with high sensitivity (ppt level) and good repeatability.

Clean Room Gas Monitors (Discontinued)

CM501 Clean Room Gas Monitor

With the increasing integration of LSI chips used in advanced products such as large flat panel displays, it is essential to regularly monitor gaseous and particle contaminants in clean rooms.

The CM501 measures ammonia, acid gases, in sample gas. They do this continuously with high sensitivity (ppt level) and good repeatability by using a diffusion scrubber and an ion chromatograph. The diffusion scrubber absorbs the sample gas in pure water, and the sample is then analyzed by the ion chromatograph.

CM505 Clean Room Gas Monitor

With the increasing integration of LSI chips used in advanced products such as large flat panel displays, it is essential to regularly monitor gaseous and particle contaminants in clean rooms.

The CM505 measures ammonia, acid gases, in sample gas and mist. They do this continuously with high sensitivity (ppt level) and good repeatability by using a impinger and an ion chromatograph. The impinger absorbs the sample gas in pure water, and the sample is then analyzed by the ion chromatograph.