CM501 Clean Room Gas Monitor

Model CM501

Clean Room Gas Monitor for Semiconductor Plants

Production Information

As the degree of integration of LSI increases as well as large scaled FPD production is driving forward, removal of gaseous contaminants such as ammonia and acid gases in clean room has become an important issue. To cope with this requirement, monitoring of air borne contaminants and periodic check of chemical performance at chemical filter is vital measure.

The CM501 clean room gas monitor measures ammonia and acid gases continuously at high sensitivity by utilizing a diffusion scrubber and an ion chromatograph. Diffusion scrubber is to absorb ammonia/acid gases in pure water. Then these are analyzed with an ion chromatograph. The CM501 realize contamination-free, on-line air borne monitoring. Optional multi-stream type (16 points) is also available.

Bulletin

for CM501

General Specification

for CM501

Features

*	Ammonia gas is measured at a sensitivity of 0.01 μg/m³.
*	Acidic gases (hydrogen chloride, phosphoric acid, sulfur dioxide, etc.) are measured at the same sensitivity of 0.02 μg/m³.
*	Ion chromatography, a highly reliable analyzing technique is used.
*	A unique diffusion scrubber technique minimizes the contamination of samples..
*	Eluent consumption is minimal and replacement of eluent is required only once a month.
*	The results are monitored on a trend graph from a work station.
*	Filterlife prediction software is available as a standard feature.
*	Samples of up to 16 points are measured (optional).

Specifications　

Measurement

Either ammonia gas or acidic gas (anion analysis: hydrogen chloride, suifur dioxide, etc.)

Gas collection method

Diffusion scrubber system

Analysis method

Ion chromatography

Measuring range

0 to 50 μg/m³

Minimum detection limit

0.01 μg/m³ (Ammonia) , 0.02mg/m³ ( Acid gas)

Measurement cycle

Minimum 35 min. cycle.

Measuring points

One point or up 16 points (optional)

Calibration

Calibration using standard solutions, automatic calibration

External contact input

Measuring stream skip signal, external alarm signal, external alarm reset signal

External contact output

Abnormal concentration signal, system alarm signal, measuring stream signal, re-measurement signal, liquid leakage signal, alarm buzzer signal, alarm light signal

Power supply

100 to 120 V AC, 50/60 Hz or 200 to 240 V AC, 50/60 Hz

Weight

Approx. 170kg (except for chemical solution, workstation, and pure water system.)