As the degree of integration of LSI increases as well as large scaled FPD production is driving forward, removal of gaseous contaminants such as ammonia and acid gases in clean room has become an important issue. To cope with this requirement, monitoring of air borne contaminants and periodic check of chemical performance is vital measure. Typical test method conducted for this purpose is impinger method. However, conventional impinger method has problem of long measuring time and cross contamination by the operator.

The CM505 clean room gas monitor realize contamination-free, on-line air borne monitoring with impinger method with measuring time of 1hour. Optional multi-stream type (16 points) is also available. The system can monitor both Ammonia (or cations) and Acid gases (Anions) depend on the requirement.