CM505 Clean Room Gas Monitor (Discontinued)

Model CM505 (Discontinued)

Clean Room Gas Monitor for Semiconductor Plants

Product Information

As the degree of integration of LSI increases as well as large scaled FPD production is driving forward, removal of gaseous contaminants such as ammonia and acid gases in clean room has become an important issue. To cope with this requirement, monitoring of air borne contaminants and periodic check of chemical performance is vital measure. Typical test method conducted for this purpose is impinger method. However, conventional impinger method has problem of long measuring time and cross contamination by the operator.

The CM505 clean room gas monitor realize contamination-free, on-line air borne monitoring with impinger method with measuring time of 1hour. Optional multi-stream type (16 points) is also available. The system can monitor both Ammonia (or cations) and Acid gases (Anions) depend on the requirement.

Features

*	Gas collection is done by impinger thus both gaseous and particle/mist contaminants are collected.
*	Ammonia gas is measured at a sensitivity of 0.01 μg/m³.
*	Acidic gases (HCl, SO2, NO2,) are measured at the same sensitivity of 0.02 μg/m³.
*	The system can monitor Boron, F^-, and Organic Acid (CH₃COO^-, HCOO^-) depend on the requirement.
*	Fully automated system and un-manned measurement.
*	Ion chromatography, a highly reliable analyzing technique is used.
*	Optional chemical filter life production software and multi-strem swicthing type (up to 16) are available.

Specifications　

Measurement

Ammonia; NH₃

Cations; Na⁺, NH₃, K⁺, Ca²⁺, Mg²⁺

Anions; Cl^-, Br^-, NO₂^-, NO₃^-, SO₃^2-, SO₄^2-, PO₄^3-

Fluoride/organic acids ;F^-, HCOO^-, CH₃COO^-, Cl^-

Boron; B

Gas collection method

Impinger method

Analysis method

Ion chromatography

Measuring range

NH₃, Cations, Anions; 0 to 50 μg/m³

Fluoride/organic acid; F^-, Cl^-: 0 to 5 μg/m³, HCOO^-, CH₃COO^-: 0 to 30 μg/m³

B; 0 to 100ng/m³

Minimum detection limit

NH₃, Cations: 0.01 μg/m^3, Acid gas; 0.02 μg/m³, PO₄M^3-: 0.05 μg/m³, F^-, Cl^-: 0.01 μg/m³ HCOO^-: 0.05 μg/m³, CH₃COO^-: 0.01 μg/m³, B: 10ng/m³

Measurement cycle

Mini60 min. or 90 min.

Measuring points

One point or up to 16 points (optional)

Calibration

Calibration using standard solutions, automatic calibration

External contact input

Measuring stream skip signal, external alarm signal, external alarm reset signal

External contact output

Abnormal concentration signal (for every stream, relay contact),
system alarm signal (relay contact), measuring stream signal (binary, relay contact), re-measurement signal (relay contact), liquid leakage signal (relay contact), alarm buzzer signal, alarm light signal

Power supply

100 to 120 V AC, 50/60 Hz

Weight

Approx. 150to 180kg depen on specifications