Large X-Y Stage
Yokogawa has developed TandemThroughStage, a next generation platform that will revolutionize the flat panel display (FPD) production process. This platform has a large X-Y stage that is capable of handling 8th generation mother glass substrates, and is also equipped with a glass substrate transport robot. By integrating the operation of FPD production machines and the transport robot, TandemThroughStage raises the productivity of the entire production line.
BridgeStage is a platform for liquid crystal display (LCD) and plasma display panel (PDP) manufacturing devices that can handle 8th generation glass substrates. Thanks to its optimum design based on structural analysis, BridgeStage has no need for a stone surface plate and is equipped with a DDM linear motor for highly efficient control, enabling users to meet tight deadlines. The BridgeStage XY stage is suitable for coater, developer, inspection, and repair devices. The Adobe Flash Player must be installed to view the BridgeStage flash demonstration. Click here to download it.