DD Stage

Improve accuracy, reduce labor time, and raise efficiency with Yokogawa’s “all-in-one” concept of providing pre-assembled subsystems containing linear and rotary motors in any combination.

MicroStage

X-Y-θ　Stage

•Maximum stroke:1800mm
•Perpendicularity (squareness): 25µm
•Parallelism: ±20µm (in a full stroke)
•Repeated positioning accuracy: ±0.1 µm (X and Y axis)
•Encoder resolution: 0.05µm (X and Y axis)
•Multi-slider
•A supplementary linear guide can be used with a long stroke model.
•Tandem stage (high thrust)

MicroStage is a unique Yokogawa X-Y-θ stage that makes integrated use of the DYNASERV direct drive motor and the LINEARSERV direct drive linear motor. Yokogawa's DYNASERV direct drive motor has been a top seller for over ten years. The LINEARSERV direct drive linear motor and the DYNASERV direct drive motor were both developed according to the same concept.

A direct drive motor is a highly accurate and high-tact next-generation actuator that requires no speed reduction devices. This type of motor has replaced traditional AC/DC servomotors, and its use has added value in the development of many different FA devices and machines.

MicroStage combines a LINEARSERV-based X-Y stage with a DYNASERV-based θ stage. It can function as both a linear and a rotation stage, and is highly accurate, fast, and compact.

MicroStage is used in all kinds of industrial devices and machines, particularly semiconductor manufacturing, inspection, and FPD manufacturing devices. This precision stage has won high praise and has been delivered to many customers.

X-Y-θ　Stage