NanoStage
PLANESERV
NanoStage is the planar surface motor traveling freely and precisely positioning on the flat surface stage that is enabled by contact-free structure featured by air-bearing.
The semiconductor laser interferometer built-in the slider not only offers the high accuracy and high speed responsibility but also allows to down-size the motor dimensions.
We regret to inform you that this product was discontinued on November 2009.
We regret to inform you that this product was discontinued on November 2009.
PLANESERV
■High accuracy
•Resolution27nm,repeatability±0.1µm(XY)(0.05angle second(θ))
•End-point feedback control of X/Y/θpositions with a semiconductor laser interferometer
positioning accuracy±1µm(linearity:2 ppm@500 mm)
•Averaging of plane error via air flotation
■High-speed response
•Settling time: 20µs(position control bandwidth is 50 Hz with a settling width of 1µm)
•No special mechanism or friction through the use of air flotation
■Compact size
•Weight of moving section: 9kg
•Equipped with a small-size interferometer using a semiconductor laser
•Integral XY drive motor structure
•Non-contact, air-flotation structure
