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A resonant sensor’s output corresponds to
its natural frequency
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Photo of resonator cross-section taken with a scanning electron microscope
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Resonators are fabricated from single silicon
crystals in a vacuum cavity using 3-dimensional micro machining techniques
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Shell |
Resonator |
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| Frequency is determined solely by physical dimensions
and mechanical constants: Young's modulus, density of silicon, size of resonator |
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Silicon resonant sensor output is fundamentally
stable and highly accurate
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Vacuum Chamber |
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