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Yokogawa Electric Corporation

Silicon Resonant Sensor Technology

Silicon resonant sensors are fabricated from a single crystal silicon using proven 3-D semi-conductor micromachining techniques. Two "H" shaped resonators are patterned on the sensor, each operating at a high frequency output. As pressure is applied, the bridges are simultaneously stressed, one in compression and one in tension. The resulting change in resonant frequency produces a high differential output (kHz) directly proportional to the applied pressure. This simple time-based function is managed by a microprocessor.
  • Micro-machined from a single silicone crystal to provide superior stability and repeatability while eliminating hysteresis.
  • Temperature effects are less than 1/10th of other silicon technologies (10 ppm/deg C), making this extremely stable in the most demanding process applications. The output produces a much higher signal to noise ratio as compared to analog sensors. Compared to piezoresistance silicon sensors, the silicon resonant sensor's immediate predecessor, the output is at least four times greater. Errors resulting from temperature and static pressure are insignificant in relation to total output.
  • This advanced sensor technology is applied to Yokogawa's DPharp pressure transmitter and MT100/200 digital manometer.

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New Releases

  • FieldMate | Asset Management
  • Pressure | DPharp EJA-E Low Power

Asset Management

FieldMate Versatile Device Management Wizard

FieldMate Versatile Device Management WizardFieldMate is a PC based configuration tool that performs numerous tasks, including initial setup, daily maintenance, troubleshooting, and configuration backup for device replacement.

Pressure

DPharp EJA-E Series Low Power, 1 to 5 V DC with HART

DPharp EJA-E SeriesThis low-power DPharp EJA-E series transmitter achieves superior energy efficiency, consuming only 27 mW (0.96 to 3 mA) of power.

Highlights

  • Pressure | DPharp Microsite
  • Flow | ADMAG Microsite
  • Wireless | Field Wireless
  • Flow | ROTAMASS LR

Pressure

DPharp Microsite

DPharp MicrositeThe highlights of DPharp unique technologies that provides superior performance, stability and reliability in your measurement.

Flow

ADMAG Microsite

ADMAG MicrositeThe highlights of ADMAG series attractive features and specifications that promise you to measure the severe flow stably.

Wireless

The world's first ISA100.11a field wireless products

The world's first ISA100.11a field wireless products- EJX B Series Differential Pressure/Pressure Transmitters
- YTA510 Temperature Transmitter
- YFGW710 Integrated Gateway

Flow

ROTAMASS LR Coriolis Mass Flowmeters

ROTAMASS LR Coriolis Mass FlowmetersThe world's smallest dual bent tube Coriolis Mass Flowmeter

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  • japanese