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- Humidity Measurement in Tantalum Capacitor
Humidity Measurement in Tantalum Capacitor
| Industry | : Electrical and Electronics |
| Product | : Zirconia Humidity Analyzer |
Introduction
Humidity Measurement in Tantalum Capacitor Pyrolysis Furnaces

In tantalum capacitor manufacturing, there is a steam pyrolysis process where tantalum pellets are decomposed by steam. Humidity control in this process is important to maintain product quality and improve yield. Stable humidity measurement at high temperatures of 200 to 400 °C is required. The ZR402G/HS Direct In Situ Zirconia High Temperature Humidity Analyzer is easy to maintain as it requires no sampling system and utilizes a long life sensor with fast response. It is widely used in humidity instrumentation applications and has been well received in the marketplace.
Expected Benefits
| - | Maintains the quality of the tantalum capacitor manufacturing process |
| - | Ensures stable, continuous humidity measurement |
| - | Reduces operating costs |
Process Overview
A tantalum pellet with an electrode plate applied is immersed in a manganese nitrate solution. This dipping process allows the
manganese nitrate to penetrate the porous part of the pellet. After dipping, the pellet is forwarded to the pyrolysis process where
the manganese nitrate is decomposed under high temperature and humidity conditions to form a manganese dioxide coating by the
reaction Mn(NO3)2 -> MnO2 + 2NO2. These steps are repeated until the coating is sufficient. To improve the coating uniformity and
yield, the humidity is controlled.
Solution Details
Field Data

Measurement System
Process conditions
Measurement system
Utilities
| Measurement point | Inside the steam pyrolysis furnace |
| Temperature | 200 to 400 °C |
| Pressure | 10 to 20 Pa |
| Humidity | 25 to 80 vol%H2O |
| Dust | None |
Measurement system
| Detector | ZR22G-☐☐☐-S-☐-C-R-☐-E-A/SV |
| Converter | ZR402G-☐-E-E-A/HS/☐ |
| Standard gas unit | ZO21S-☐-E*A |
Utilities
| Power supply | rated voltage: 100 to 240 V AC operating voltage range: 85 to 264 V AC rated frequency: 50/60 Hz operating frequency range: 45 to 66 Hz |
| Power consumption | approx. 100 VA (300 VA max.) |
Notes on Installation
As the sensor inside a pyrolysis furnace is hot, it can be easily
damaged if cooler water drips onto it. The sensor should be
installed with the probe head pointing downward.

Steam Pyrolysis Process
in Tantalum Capacitor
Manufacturing

