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YOKOGAWA

Yokogawa Electric Corporation

Application Note

Monitoring Temperature in Clean Rooms

In semiconductor manufacturing processes, a deficient clean room environment can lead to defects and wasted resources, making a strictly controlled clean room indispensable. Maintaining the environment in the clean room requires control of air filters, HVAC systems, room temperature, humidity, airborne particles, and other factors.

For remote monitoring applications, the MW100 offers a full set of features that let you access data instantly by entering a unit’s URL into a Web browser. And in addition to being able to acquire data files remotely, an e-mail function can be used for notification of abnormalities.

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