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Yokogawa Electric Corporation





OX400 Low Concentration Zirconia Oxygen Analyzer

Models OX400
Low Concentration Zirconia Oxygen Analyzer

Product Information

Low Concentration Zirconia Oxygen Analyzer  OX400

Regulatory Compliance

This is the latest oxygen analyzer from Yokogawa, and its development was based on the company's long experience and strong track record with this technology.
A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to control environment, air leakage into inert gas, and other processes.
Oxygen concentration control in semiconductor-related diffusion and drying furnaces and in LCD manufacturing processes
Oxygen concentration control in solder pot flow and re-flow ovens, and glove boxes used in electronics manufacturing, and in gas production processes
Oxygen concentration measurements to prevent dust explosions during powder transfer

   Bulletin for OX400
   General Specification for OX400
   User's Manual for OX400
   Selection Guide for Oxygen Analyzer


Long life and high-speed response

Thanks to the use of Yokogawa's proprietary new thin-film deposition technology, the sensor has three times the lifespan of those used in our earlier products
A cylindrical sensor design facilitates the replacement of measurement gases, thereby helping to assure a high-speed response

High performance and high reliability

Superior repeatability and linearity even at low oxygen concentrations
Either pump or aspirator sampling can be selected, depending on the application

Built-in functions and a variety of self-diagnosis functions

Comes with multi selector, auto range, partial range, and pump on/off functions
A variety of self-diagnosis functions are provided that detects malfunctions such as heater temperature error, temperature sensor burnout, and sensor resistance value error.

Superior maintainability

The sensor can be replaced on-site
Compact and lightweight for easy installation


Measurement object Oxygen concentrations in inert gases containing no flammable gas, silica, corrosive gas, or liquid (including water vapor)
Measurement system Zirconia system
Sampling method Pump, aspirator, or no suction device
Sample gas conditions Flow rate: 200 ± 25 ml/min (only applies to sensor)
Temperature: 0-50℃ (non-condensing)
Humidity: Non-condensing
Pressure: 0-300 PaG
Measurement range 0-10 ppm O2 to 0-100 vol% O2
Resolution 0.01 ppm O2
Output range
Auto: 0-10 ppm, 0-100 ppm, 0-1000 ppm, 0-1%, 0-10%, 0-100% (default)
Other: 0- □0 ppm,0- □00 ppm, 0- □000 ppm, 0- □%, 0- □0%. □ is an integer from 2 to 9
Fixed: Set to 0-10 ppm, 0-100 ppm, 0-1000 ppm, 0-1%, 0-10%, or 0-100%
Partial: Lower value or upper value of range can be set
Analog output 2 outputs,
Primary: 4 to 20 mA DC (maximum load resistance: 550Ω )
Secondary: Select from 0-1, 0-5, 0-10 V DC (load resistance: 10 kΩ or greater)
Contact output
3 outputs : Error, O2 concentration alarm contact, range marker output contact
Multi selector(optional) :
  Contact output for switching of measurement flow path, contact output for measurement flow path data
Contact input 1 point; Remote switching for sample gas suction pump ON/OFF
Error (failure): Sensor unit error, heater temperature error, temperature sensor disconnection, device temperature error, CPU error, fan stop
Alarm (warning): Heater unstable, sensor defect, electromotive force abnormal, asymmetry voltage error, calibration error, sensor resistance error, O2 concentration upper/lower, over range
Serial communication RS-232,38400 bps
Calibration methods (1) 3 point: 10 ppm, 1000 ppm, air, (2) 2 point: zero and span calibration may be set freely, (3) 1 point, (4) Air calibration
Warm-up time Within 20 min
Power supply 100 to 120 V AC/200 to 240 V AC, 50/60 Hz
Power consumption 100 to 120 V AC, 200 VA max., 200 to 240 V AC, 400 VA max
Dimension 213 (W) x 132 (H) x approx. 375 (D) mm
Weight: Approx. 5 kg
Line connection Gas inlet: Rc1/4 or 1/4NPT female
Gas outlet: Rc1/4 or 1/4NPT female
Environment and operational conditions
Installation conditions: Indoors, panel or wall mounting, non explosion area
Ambient temperature: 0 to 40℃, non-condensing
Ambient humidity: 5 to 85% RH
Storage temperature: -5 to 50℃
Conformance to safety and EMC standards
Safety: 61010-1, CAN/CSA-C22.2 No.61010-1-04, UL Std. No. 61010-1
EMC: EN 61326-1 Class A, Table 2 (For use in industrial locations) EN 61326-2-3, EN 61000-3-2, EN 61000-3-3
KC Marking: Korea Electromagnetic Conformity Standard


Repeatability ±1% FS (Hereafter, FS is either 10, 100, 1000 ppm, 1%, 10%, or 100% O2 )
Linearity ±2% FS
±3% FS (0-100 ppm or less)
Response time 90% response
within 10 sec (0-1% or more)
within 30 sec (less than 0-1%)
Drift ±2% FS / week