TOK Taiwan Tongluo PlantMES with High Traceability Enables Production of High Quality Photoresist for Semiconductor ApplicationsExecutive SummaryThe semiconductor industry is characterized by extremely rapid change, as the components in integrated circuits grow ever smaller on the nanometer scale and microprocessors steadily become more powerful. Photoresists are light-sensitive chemical materials that play a key role in the semiconductor fabrication process, and they must evolve in functionality and quality to meet the changing needs of state-of-the-art microprocess technology. Manufacturers are posing ever tougher requirements on their photoresist suppliers, demanding not only increased product quality and functionality but also a level of traceability that is comparable with that in pharmaceutical manufacturing processes.Established in 1940, TOKYO OHKA KOGYO CO., LTD. (TOK) is a global supplier of value-added photoresists and other fine chemicals as well as equipment used in the production of semiconductors and liquid crystal displays. In 1998 the company entered the Taiwan market, where its subsidiary TOK TAIWAN CO., LTD. has sold thinners and a variety of semiconductor-related ancillary chemicals to semiconductor manufacturers and supply chain partners. In November 2014, the company launched production of photoresists at its new Tongluo plant, which is equipped with leading-edge production equipment and is controlled using Yokogawa’s CENTUM VP integrated production control system. The plant also utilizes a Yokogawa manufacturing execution system (MES) that has helped to standardize plant operations and thereby maintain the stable production of high-quality photoresists.Plant InformationLocation: Tongluo, Miaoli County, TaiwanOrder date:2013Completion:November 2014Production equipment in the Tongluo plant’s clean room1Success Story CollectionChemical (Fine & Specialty Chemical, Biofuel)& Pharmaceutical

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