Semiconductor Equipment

Solutions for Semiconductor Equipment

Yokogawa's strengths

Yokogawa has been providing cutting-edge “mother tools” in the fields of measurement, control, and information for more than 100 years. Leveraging the corporate culture, experience, and technology cultivated during this history gives us a major advantage in equipment solutions; we can provide comprehensive information systems, controllers, sensors, and measuring instruments that support semiconductor equipment as mother tools. 

semiconductor equipment overview

Details

Semiconductor Manufacturing Process

semiconductor equipment details1

semiconductor equipment details2

 

Centralized control to Distributed Control to reduce takt time thanks to e-RT3 Plus

 

Customer’s problem

1. Customization of chambers is difficult because of complex design with one PC configuration. 
    Design matched each end-user’s application is not possible.
2. With one PC, real-time control does no work properly if the number of chambers increases.
    (Delay happens at concurrent control)

semiconductor equipment details3

 

Solution

1. Reduce the load of PC by installing edge controller in each chambers
2. Realize real-time control by multiple e-RT3s
3. Stable supply

semiconductor equipment details4

 

Related Product Page

FA-M3 (Programmable Logic Controllers)
e-RT3 (Realtime OS-based Machine Controllers)
Data Loggers (SMARTDAC+) (Data Acquisition)
Flowmeters (YEWFLO, ADMAG)
Gas Analyzers (NR800)
Oxygen Analyzers (OX400)
Temperature Controllers (UTAdvanced)
Components (VZ20X)
Test & Measurement

기술 및 솔루션, 요꼬가와에 대한 자세한 정보를 찾고 계십니까?

견적 및 기술문의

Top