Solutions for Semiconductor Equipment
Yokogawa has been providing cutting-edge “mother tools” in the fields of measurement, control, and information for more than 100 years. Leveraging the corporate culture, experience, and technology cultivated during this history gives us a major advantage in equipment solutions; we can provide comprehensive information systems, controllers, sensors, and measuring instruments that support semiconductor equipment as mother tools.
Semiconductor Manufacturing Process
Centralized control to Distributed Control to reduce takt time thanks to e-RT3 Plus
1. Customization of chambers is difficult because of complex design with one PC configuration.
Design matched each end-user’s application is not possible.
2. With one PC, real-time control does no work properly if the number of chambers increases.
(Delay happens at concurrent control)
1. Reduce the load of PC by installing edge controller in each chambers
2. Realize real-time control by multiple e-RT3s
3. Stable supply
Related Product Page
FA-M3 (Programmable Logic Controllers)
e-RT3 (Realtime OS-based Machine Controllers)
Data Loggers (SMARTDAC+) (Data Acquisition)
Flowmeters (YEWFLO, ADMAG)
Gas Analyzers (NR800)
Oxygen Analyzers (OX400)
Temperature Controllers (UTAdvanced)
Test & Measurement
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