Semiconductor Equipment

Semiconductor manufacturing and processes are facing new and difficult challenges. Global supply chain issues, speed and cost to market, accuracy, and space constraints, just to name a few. Yokogawa has been a partner to Semiconductor Equipment manufacturers for decades. Yokogawa not only provides the technology to overcome obstacles in manufacturing processes, but we also work with you to achieve stable supply chains, increase speed to market, bring down costs, and improve quality. Yokogawa is a global company providing industry-leading service and support to our customers. See what Yokogawa can do for you.

 

Industry Challenges. Yokogawa Solutions.

 

 

OpreX™ Control Devices

Intelligent Edge Controllers A8

 

The OpreX Intelligent Edge Controller A8 is a Linux-based embedded controller equipped with a high-performance Cortex-A53 processor. By enabling program development independent of the hardware specifications of controlled devices, it shortens development time and improves application reusability, allowing for flexible and efficient system development.

 

Features

• High-performance processor-equipped Linux-based embedded controller:
  Equipped with an ARM processor (Cortex-A53 Quad core 1.2GHz), enabling high-speed and stable control.
• Provides control functions as embedded equipment controller (selectable via option code):
  Standard License (Option code /STN): Motion Control: 8 axes, PID Control: 16 loops Advanced License (Option code /ADV): Motion Control: 32 axes, PID Control: 64 loops Common: EtherCAT MainDevice Function (connects to up to 128 SubDevices)
• Features “Data stream” interface for hardware abstraction:
  Data stream is a device interface that separates software from hardware. It streams data acquired by devices such as sensors, actuators, and communication services, constantly providing the latest information to programs. Hardware and software are connected via tags on the data stream, enabling programs to be written without awareness of hardware specifications, thereby shortening development time and improving reusability.
• De facto standard development environment:
  Visual Studio Code, which is widely used by programmers worldwide, is used as the development environment. The development language supports C/C++.
• Configuration tool:
  This configuration tool determines A8's operation, including data stream. It enables assignments of data stream tags handled by data stream and communication settings. The configuration files generated by this tool synchronize hardware and software.
• Robust security features:
  In addition to role-based login permission settings, features such as project file encryption and malware protection through TPM* implementation help protecting customer’s software assets and contribute to stable factory operations. * TPM (Trusted Platform Module) is a security-specific hardware chip embedded in control devices.
  
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Wafer Process

Etching

Yokogawa Controller e-RT3 makes Centralized control to Distributed control to improve

• Time to market
• Performance (=Higher speed, synchronize ability)

One of our customer used to control the machine with one powerful PC to control chambers, rest of controls has done by VME boards that connected with serial communication between PC. This system has issues such as low customization because of complex design, non real time control if the number of chambers increase.