Yokogawa Technical Report / No.32 (2001)

Yokogawa periodically publishes the Yokogawa Technical Report, which contains articles that take a detailed look at the technologies employed in Yokogawa's products. At this site you will find links to all of the reports that have been published since 1997 as well as links to PDF files containing the full text of selected articles from each issue.



  • HIRATA Takaaki*1
  • HIHARA Mamoru*1
  • NAGAYAMA Hideki*1

*1 R & D Center

We have developed a wavelength-stable laser diode for light sources of laser interference positioning systems and photodiode array for photodetectors. These devices allow laser interference systems to be downsized, and expand the range of applications of such systems. A single-mode oscillation, narrow spectral linewidth and long-term wavelength stability are essential for light sources of laser interference positioning systems. In order to realize these requirements, we have employed a large-cavity structure with diffraction gratings in the cavity. Long-term stability was confirmed by performance tests for 20,000 hours or more. We employed an 18-element p-n junction silicon photodiode structure for photodiode arrays of high sensitivity and fast response. This paper describes the newly developed photonic devices.


  • HASHIDA Shigeru*1
  • KAIHO Fumio*1
  • KOIZUMI Yutaka*1
  • TAMURA Tetsuji*1

*1 Motion & Measurement Business Div.

Recently the need for a more precise and high-contact positioning XY stage is increasing dramatically in line with the greater demand for fine fabrication of semiconductor devices and for reducing Co0 of those manufacturing equipment. We have therefore developed a completely new type of servo XY-stage system called PLANESERV. It employs a slider consisting of a three-axis laser interferometer and integrated three-axis drive motor, which moves along the surface of a platen without generating friction due to being elevated with air bearing. The PLANESERV boasts high resolution (0.1 μm), high precision (linearity: 1 μm), lighter movable part, and high settling time (20 ms at 1 μm settling) positioning. The drive motor used with the non-interactive digital control system also achieves high performance.


  • OHYA Akira*1
  • MIYAMOTO Hidenori*1

*1 Motion & Measurement Business Div.

We have developed the HS2000 series of pick-and-place IC handlers and the LT9730 series of gravity IC handlers. IC handlers used in combination with testers automatically carry untested devices to the socket from the input tray. The devices are automatically sorted and stored in output trays according to the test results. For fine-pitch ICs such as BGA (Ball Grid Array), the HS2000 series employs a pickand-place handling technique to consecutively process the devices stored in trays. The HS2000 series can achieve high-speed and highly-accurate device transportation and positioning by using linear motors, and thus reduce the jam rate to 1/10 that of conventional types, and greatly improving the operating ratio. Moreover, HS2000 series has fewer parts that cause friction like gears and belts, consequently reducing maintenance costs.

On the other hand, for SOP (Small Outline Package), the LT9730 series employs a gravity handling system to process devices stored in stick tubes or aluminum magazines. The LT9730 series has one of the highest throughput rates and is the most functional series of IC handlers in the world, which is achieved by replacing the two parallel heads with four parallel heads and using a new contact. Furthermore, the singulator's automatic jam-clearance mechanism has successfully kept the jam rate to a minimum.


  • ODA Shinji*1

*1 Industrial Automation Systems Business Div.

Yokogawa has implemented in the CENTUM CS 3000 R3 a new, two-layer I/O architecture that integrates field networks into a distributed control system with general analog and digital inputs/outputs. This new architecture consists of two types of nodes: one directly connected to a controller CPU and capable of communicating and updating a large amount of data at a high speed, and the other connected to a controller CPU via a communication bus and placed near field devices. These two types of nodes allow flexible system configuration according to the applications while assuring a sufficiently short data updating period and reducing of wiring costs.


  • SHIMIZU Kennosuke*1
  • KASE Shuji*1

*1 Industrial Automation Systems Business Div.

As more field networks, typified by FOUNDATIONTM Fieldbus, are made practicable, requirements for use of field networks have been gradually increasing for plant instrumentation based on a distributed control system (DCS). Whereas, DCS control with traditional 4-20 mA input/output signals is also indispensable to mission-critical plant instrumentation where high reliability and operation over a long term are needed. This means growing importance for DCSs to flexibly meet the requirements from each customer's standpoint, and connect to conventional input/output devices and various innovative field network devices. In Yokogawa's CENTUM CS 3000 R3, configuration of a DCS consisting of such diverse input/output devices has been implemented on the basis of integrated engineering functions, which allows users to easily configure applications whatever the types of inputs/outputs of the controlled objects. The CENTUM CS 3000 R3 also provides a consistent operation environment in which users may not be conscious of whether each object is controlled by the CENTUM CS 3000 R3 or a fieldbus device.


  • MORI Hiroshi*1
  • MACHIDA Akiharu*1
  • OZAKI Masahiro*1
  • SUKEGAWA Hiroko*1

*1 Industrial Automation Systems Business Div.

The PRM (Plant Resource Manager) field device management package has been developed to improve the efficiency of maintenance management of field devices. PRM features include the preventive maintenance management of devices that correspond to the digital interactive field network typified by FOUNDATIONTM Fieldbus. It corresponds to the diversified maintenance method by classifying and managing device maintenance information such as inspection schedules, inspection memos, and configuration information of devices, in two or more phases. Moreover, operation information on a field device can be easily acquired online via a remote bus and this information can be used for maintenance. This document describes the functions of PRM, and its contribution to the reduction in maintenance costs and the use of field device information for plant operation to decrease the TCO (Total Cost of Ownership).


  • SAITO Yoji*1
  • NISHIJIMA Takeshi*1
  • INOUE Akira*1
  • MASUKI Koichi*1

*1 Products Business Div.

YVP110 is a valve positioner conforming to FOUNDATIONTM fieldbus standard. YVP110 maintains high reliability by using a non-contacting position sensor and a newly developed small I/P module. Compared with conventional analogmechanical positioners, YVP110 demonstrates dramatically enhanced functionality and improved positioning performance, achieved by valve diagnostics and a nonlinear compensation control algorithm. This document describes the features of YVP110 plus its superior controllability and maintenance ability, which contribute to reduced plant operation costs.


  • MORITA Mikihiko*1
  • KAKIHARA Kaname*1
  • HATTORI Hitoshi*1
  • TAKAHASHI Masahiko*1

*1 Network Solutions Div.

We have added a fieldbus interface to the DAQSTATION. In order to take advantage of the multi-channel measurement and trend-display capabilities of the DAQSTATION, we installed multiple analog input (MAI) and multiple analog output (MAO) function blocks. The DAQSTATION thus has become able to deal with a wide range of applications, from large-scale instrumentation using distributed control systems (DCS) to stand-alone small-scale supervisory systems. The DAQSTATION is now capable of easy networking through connection between a fieldbus and Ethernet. This paper describes examples of such applications.