Humidity Measurement in Tantalum Capacitor Pyrolysis Furnaces

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Humidity Measurement in Tantalum Capacitor Pyrolysis Furnaces

Steam Pyrolysis Process in Tantalum Capacitor Manufacturing
Steam Pyrolysis Process
in Tantalum Capacitor

In tantalum capacitor manufacturing, there is a steam pyrolysis process where tantalum pellets are decomposed by steam. Humidity control in this process is important to maintain product quality and improve yield. Stable humidity measurement at high temperatures of 200 to 400°C is required. The ZR402G/HS Direct In Situ Zirconia High Temperature Humidity Analyzer is easy to maintain as it requires no sampling system and utilizes a long life sensor with fast response. It is widely used in humidity instrumentation applications and has been well received in the marketplace.

Expected Benefits

  • Maintains the quality of the tantalum capacitor manufacturing process
  • Ensures stable, continuous humidity measurement
  • Reduces operating costs

Process Overview

A tantalum pellet with an electrode plate applied is immersed in a manganese nitrate solution. This dipping process allows the manganese nitrate to penetrate the porous part of the pellet. After dipping, the pellet is forwarded to the pyrolysis process where the manganese nitrate is decomposed under high temperature and humidity conditions to form a manganese dioxide coating by the reaction Mn(NO3)2 -> MnO2 + 2NO2. These steps are repeated until the coating is sufficient. To improve the coating uniformity and yield, the humidity is controlled.

Solution Details

Field Data

Measurement System

Measurement System

Process conditions

Measurement point Inside the steam pyrolysis furnace
Temperature 200 to 400°C
Pressure 10 to 20 Pa
Humidity 25 to 80 vol%H2O
Dust None

Measurement system

Detector ZR22G-☐☐☐-S-☐-C-R-☐-E-A/SV
Converter ZR402G-☐-E-E-A/HS/☐
Standard gas unit ZO21S-☐-E*A


Power supply rated voltage: 100 to 240 V AC
operating voltage range: 85 to 264 V AC
rated frequency: 50/60 Hz
operating frequency range: 45 to 66 Hz
Power consumption approx. 100 VA (300 VA max.)

Notes on Installation As the sensor inside a pyrolysis furnace is hot, it can be easily damaged if cooler water drips onto it. The sensor should be installed with the probe head pointing downward.

Related Products & Solutions

Single Channel Oxygen Analyzer System ZR22/ZR402

The ZR probe's in-situ measurement method does not require any process conditioning or extractive sampling. This reduces maintenance costs and allows faster measurement response to changes in the process.


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