Limiting Current Type Oxygen Analyzer OX102

The OX102 Oxygen Analyzer measures oxygen concentration from ppm to percent levels in a single analyzer and is ideal for ppm-level measurements in applications such as nitrogen reflow furnaces and semiconductor plants.

The zirconia oxygen sensor uses a method that is based on the limiting current principle and is compact, yet has high-performance. The sensor is designed for installation by direct insertion

When a sample gas contains organic solvent at a few ppm to percent level in applications such as nitrogen reflow furnaces, an optional sampling unit is required.

  • One instrument capable of measuring from 0 - 100 ppm to 0 - 25% oxygen
  • Simple one touch calibration
  • Self diagnostics assure high reliability
  • One touch sensor replacement
  • Compact size

Measuring Principle

Current flowing in the Zirconia fixed electrolyte causes oxygen to move from the negative to positive electrode (acts as an oxygen pump). If the flow of oxygen to the negative electrode is restricted by the alumina substrate then a current saturation area is created and the same current flows regardless of the applied voltage. The current that flows is called the limiting current. When a fixed voltage is applied, the current flow is proportional to the oxygen concentration.




  1. N2 reflow furnaces
  2. Semiconductor maker environmental monitoring
  3. ppm-level O2 measurement
  4. Monitoring purity of N2, Ar separated from air
  5. Monitoring for deficiency of O2
Measured gas O2 in N2 or mixed gases; cannot be used with silicone vapor, combustible gases and organic solvents
Measurement principle Zirconia limiting current method
Measuring range 0 - 100 ppm/0 - 1000 ppm/0 - 10000 ppm/0 - 25%, automatic/fixed switching mode
Sampling method Natural diffusion system. If the sampled gas may include organic solvents, use a sampling unit.
Sample gas conditions Temperature; 0 to 70℃
Humidity; 0 to 80%RH
Pressure; 1013±40 hPa(Abs)
Output signal 1. 4-20 mA DC isolated, fixed range(0 - 100, 0 - 1000, 0 - 1000 ppm, 0 - 25% selectable), or 4 - 20 mA DC autoranging
2. 1 to 5 V DC fixed range(0-100, 0-1000, 0-10000 ppm, 0-25% selectable)
3. Zone signal output for 4 - 20 mA DC autoranging
Contact output 2 outputs
Alarm output High or Low alarm
Calibration a. Atmospheric air one-point calibration : 15 to 25% O2 range
b. One-point calibration at 100 ppm : 80 to 120 ppm O2 range
c. One-point calibration at 1000 ppm : 900 to 1100 ppm O2 range
d. One-point calibration at 10000 ppm : 8500 to 9500 ppm O2 range
e. Complete calibration : with air, 20, 100, 500, 1000, 10000 ppm in that order
Extension cable 4 m, 9 m, 29 m
Power supply 100 to 240 V AC, 50/60 Hz, approx. 15 W
Converter size 96(W) x 96(H) x 190(D) mm
Repeatability ±15 ppm O2( Meas. range: 20 to 100ppm)
±25 ppm O2( Meas. range: 100 to 1000 ppm)
±0.3% of reading( Meas. range: 1000 to 5000 ppm)
±7.5% of reading( Meas. range: 5000 to 10000 ppm)
±0.25% O2( Meas. range: 1 to 25%)

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