Precision Flow Control for High-Purity Semiconductor Materials

The Yokogawa ROTAMASS TI Coriolis Flowmeter is a reliable, High-Accuracy flowmeter providing a maintenance free and durable performance solution.

 

Application

Photosensitive materials play a vital role in a wide range of everyday products, both personal and professional. They form the foundational components in devices such as smartphones, personal computers, medical equipment, and communication systems used in IoT applications. The development of these materials involves several critical steps, including coating, exposure, development, etching, and cleaning.


Photosensitive materials.

Challenges

With the rising global demand for semiconductors, a leading manufacturer of photosensitive materials made the strategic decision to expand its production facility. During the development of these materials, a Coriolis flowmeter plays a critical role in accurately measuring and controlling the mass flow of fluids—particularly during the blending and mixing of raw ingredients, where precise ratios are essential to ensure consistent product quality.

Key chemicals such as acetone, methanol, organic solvents, and others are used throughout the process to dissolve photoresist materials, facilitate image transfer during exposure and development, and eliminate unwanted residues.

To stay competitive in a price-sensitive market, the manufacturer needed a durable, high-precision Coriolis flowmeter that could both enhance operational efficiency and meet the rigorous demands of the new expansion facility.
 

Solution

After evaluating several competitive Coriolis flowmeters, the customer ultimately selected the Yokogawa ROTAMASS TI flowmeter. Its high-precision accuracy of 0.1% enabled precise measurement and control of fluid mass flow during the blending and mixing of raw ingredients. This level of accuracy significantly reduced costs by minimizing waste due to over- or under-dosing. 


Photosensitive sensor on a flexible printed circuit board.

Key Benefits

  • Measurement and Control with high-precision accuracy of 0.1%
  • User friendly with a durable and Maintenance-Free design, reducing downtime
  • Various integral and remote models to fit any process
     


ROTAMASS TI Coriolis Flowmeter

Related Industries

  • Power

    Since the 1970s, Yokogawa has partnered with power producers to squeeze every watt of efficiency and resilience from assets old and new. Today our 30,000+ CENTUM control systems and 230 service hubs span 100 countries, uniting domain know‑how, ISASecure™‑certified automation, and real‑time analytics. Whether you run a single gas turbine or a continent‑wide renewable fleet, we deliver the insight, safety, and speed you need to thrive in a decarbonizing grid.

  • Semiconductor

    Yokogawa provides the products and solutions that support for the semiconductor industry.

  • Semiconductor Equipment

    Yokogawa provides the products and solutions that support for the semiconductor equipment industry.

Related Products & Solutions

  • Flow Meters

    Achieve precision flow measurement with field-proven sensor technology.

  • ROTAMASS Total Insight

    It is the most technologically advanced mass flowmeter yet. By combining the superior design of the application specific flow sensor and transmitters with the Total Insight philosophy and functionality, the flexibility of the Rotamass to adapt to changing  requirements guarantees performance throughout the lifecycle of the process measurement.

     

×

Have Questions?

Contact a Yokogawa Expert to learn how we can help you solve your challenges.


Top