技术的飞速发展对半导体的高集成度和微型化提出了更高要求，这也成为众多客户面临的严峻挑战。
横河电机致力于充分利用我们在半导体行业多年积累的经验与技术，为客户提供优化的解决方案。
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半导体设备
横河电机提供支持半导体设备行业的产品和解决方案。
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Minimal Fab Solution
Let Minimal Fab shines upon your creativity, thirst for innovation, knowledge, and training.
参考
In semiconductor manufacturing processes, a deficient clean room environment can lead to defects and wasted resources, making a strictly controlled clean room indispensable. Maintaining the environment in the clean room requires control of air filters, HVAC systems, room temperature, humidity, airborne particles, and other factors.
What if you could detect signs of abnormalities in bus ducts (bus bars) quickly during maintenance and inspection work and respond to them at just the right time? Yokogawa DTSX monitoring solution constantly monitors connections that tend to deteriorate over time and contributes by pinpointing abnormality locations and reducing workload of maintenance personnel, helping to ensure stability in plant operations.
视频
As a gateway to further expand Yokogawa's messaging as a One-stop Solution Business, Yokogawa has partnered up with INCIT, to introduce the S.I.R.I. framework.
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